Title :
Dynamics of Micro-Plasma Generated at Solid-Solid Interface Transparent Material by UV-Laser Pulses
Author :
Nakamura, Daisuke ; Nishimura, Jun ; Okada, Tatsuo
Author_Institution :
Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka
Abstract :
Dynamics of micro-plasma generated at an interface between a solid target of carbon or germanium and a SiO2 substrate by UV-laser pulses was investigated. The emission characteristics of the micro-plasma were measured by time-resolved emission spectroscopy. The target and the substrate surfaces were examined with a scanning electron microscope.
Keywords :
interface phenomena; plasma diagnostics; plasma production by laser; scanning electron microscopy; time resolved spectra; SiO2; SiO2-C; SiO2-Ge; UV-laser pulses; microplasma generation dynamics; scanning electron microscope; solid-solid interface transparent material; time-resolved emission spectroscopy; Germanium; Laser beams; Plasma applications; Plasma materials processing; Plasma measurements; Plasma temperature; Pulse generation; Solids; Surface emitting lasers; Surface morphology;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391697
