Title :
Design and characterization of a quasi-optical mixer fabricated using silicon micromachining
Author :
Neculoiu, D. ; Petrini, I. ; Buiculescu, C. ; Dragoman, M. ; Muller, A. ; Bartolucci, G. ; Marcelli, R. ; Giacomozzi, F.
Author_Institution :
IMT-Bucharest, Bucharest
Abstract :
A silicon micromachined uniplanar quasi-optical mixer is presented for the first time. The circuit is based on a membrane-supported double folded slot antenna and a GaAs flip chip Schottky diode, mounted on the bulk area of the structure. The 1.5 mum thin dielectric membrane was obtained by micromachining of high resistivity (100) oriented silicon. The circuit is designed for the 38 GHz frequency range using coplanar waveguide technology and full-wave electromagnetic simulations. The mixer is characterized using the isotropic conversion losses parameter and a value of 10 dB was measured at 38 GHz
Keywords :
Schottky diode mixers; coplanar waveguides; electromagnetic waves; flip-chip devices; gallium arsenide; micromachining; millimetre wave mixers; silicon; slot antennas; 1.5 mum; 38 GHz; GaAs; coplanar waveguide technology; dielectric membrane; flip chip Schottky diode; full-wave electromagnetic simulations; high resistivity oriented silicon; isotropic conversion losses parameter; membrane-supported double folded slot antenna; silicon micromachining; uniplanar quasi-optical mixer fabrication; Biomembranes; Circuits; Dielectric loss measurement; Electromagnetic waveguides; Flip chip; Gallium arsenide; Micromachining; Schottky diodes; Silicon; Slot antennas;
Conference_Titel :
Electrotechnical Conference, 2006. MELECON 2006. IEEE Mediterranean
Conference_Location :
Malaga
Print_ISBN :
1-4244-0087-2
DOI :
10.1109/MELCON.2006.1653074
