Title :
New AFM imaging for high aspect structures: STI and contact holes
Author :
Morimoto, T. ; Kuroda, H. ; Minomoto, Y. ; Nagano, Y. ; Kembo, Y. ; Hosaka, S.
Author_Institution :
Hitachi Kenki Fine Tech. Co. Ltd, Ibaraki, Japan
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
New AFM imaging technique (step-in mode) has been developed to remove the friction or torsion against the probe caused by xy scanning under the constant gap control. As experimental results show, this method can observe STI structure faithfully by high aspect ratio probe with less damage. We conclude that the step-in mode proposed in this paper is useful for in-line evaluation of STI structure.
Keywords :
atomic force microscopy; isolation technology; probes; AFM imaging; STI; constant gap control; contact holes; friction; high aspect structures; in-line evaluation; probe; shallow trench isolation; step-in mode; torsion; Atomic force microscopy; Electron microscopy; Force measurement; Friction; Image resolution; Large scale integration; Probes; Servomechanisms; Servosystems; Surface cracks;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984181
