Title :
Lens fabrication on optical fiber end using photolithography
Author :
Sasaki, M. ; Ando, T. ; Nogawa, S. ; Hane, K.
Author_Institution :
Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
New photolithography techniques for fabricating the lens on the optical fiber end are developed and the promising results are obtained.
Keywords :
lenses; optical fibre fabrication; photolithography; lens fabrication; optical fiber end; photolithography; Lenses; Lithography; Optical device fabrication; Optical fiber devices; Optical fiber networks; Optical fibers; Resists; Shape; Spraying; Surface tension;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984187
