DocumentCode
2251685
Title
Traveling down the microchannels: Fabrication and analysis
Author
Kulkarni, Anjali V. ; Jain, Vijay Kumar ; Misra, Krishna Avtar
Author_Institution
Indian Inst. of Technol., Kanpur, India
fYear
2010
fDate
6-9 July 2010
Firstpage
1186
Lastpage
1190
Abstract
Fabrication and analysis of microchannels on glass (coverslip) substrate are presented here. Microchannels are fabricated by using electrochemical spark micromachining process developed in house. The said process is evolved for machining of non-metals. The paper discusses in brief, the design and development of the experimental set-up along with the technique devised for the analysis of fabricated microchannels in terms of their shape, surface topography, and dimensions. The technique is based on making the negative replica of the microchannel by polydimethysiloxane (PDMS).
Keywords
micromachining; micromechanics; coverslip substrate; electrochemical spark micromachining process; microchannel analysis; microchannel fabrication; polydimethysiloxane;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics (AIM), 2010 IEEE/ASME International Conference on
Conference_Location
Montreal, ON
Print_ISBN
978-1-4244-8031-9
Type
conf
DOI
10.1109/AIM.2010.5695946
Filename
5695946
Link To Document