Fabrication of channel waveguides in 2D photonic crystals of Si nanopillars

Photonic crystals (PCs) consist of periodic dielectric structures, which produce photonic band gaps (PBGs) where propagation of light is forbidden. PCs have inspired great interest because they can be applied for a lot of attractive optical devices such as lossless dielectric mirrors and resonant cavities. One of the promising applications is an optical waveguide composed of a line defect in PC. Introduction of a line defect gives rise to a localized defect state in the PBG, where the light is allowed to propagate. Thus the line defect acts as an optical waveguide. Here we present the fabrication of channel waveguides in 2D photonic crystals of Si nanopillars and their optical properties.