Title :
Ultraviolet Photocodetector Based on MgxZn1-xO(0 ⩽ x ⩽ 0.36) Thin Films Deposited by RF Magnetron Sputtering
Author :
Lee, Hsin-Ying ; Wang, Ming-Yi ; Lee, Ching-Ting
Author_Institution :
Inst. of Electro-Opt. & Mater. Sci., Nat. Formosa Univ., Yunlin
Abstract :
The MgxZn1-xO thin films for x varying from 0 to 0.36 were deposited by RF magnetron sputtering. The MgxZn1_xO films are characterized by X-ray diffraction and UV-visible spectroscopy. The MgxZn1-xO metal-semiconductor-metal ultraviolet photocodetectors (MSM-UPDs) were fabricated. We also investigated the electrical and optical properties of the MSM-UPDs.
Keywords :
X-ray diffraction; magnesium compounds; metal-semiconductor-metal structures; optical films; photodetectors; sputter deposition; ultraviolet detectors; ultraviolet spectroscopy; visible spectroscopy; Al2O3; MgZnO; RF magnetron sputtering; UV-visible spectroscopy; X-ray diffraction; electrical properties; metal-semiconductor-metal ultraviolet photocodetector; optical properties; thin film deposition; Lattices; Optical films; Photonic band gap; Pulsed laser deposition; Radio frequency; Spectroscopy; Sputtering; Substrates; X-ray diffraction; Zinc oxide;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391726
