Title :
Loss-reduced rectangular ring laser based on active vertical coupler through asymmetric double shallow ridge and ICP/ICP cascade etching
Author :
Zhang, R. ; Ren, Z. ; Yu, S.
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. of Bristol, Bristol
Abstract :
Rectangular ring lasers based on an active vertical coupler structure are fabricated through asymmetric double shallow ridge and ICP/ICP cascade etching. 25% reduction of Ith and the single mode operation with SMSR 23dB are achieved.
Keywords :
laser cavity resonators; optical couplers; optical fabrication; optical losses; ring lasers; semiconductor lasers; sputter etching; ICP/ICP cascade etching; SMSR; active vertical coupler structure fabrication; asymmetric double shallow ridge; inductively coupled plasma etching; loss-reduced rectangular ring laser; single mode operation; Etching; Laser modes; Optical coupling; Optical materials; Quantum cascade lasers; Rectangular waveguides; Ring lasers; Semiconductor lasers; Threshold current; Waveguide lasers; (140.3560) Lasers, ring; (140.5960) Semiconductor Lasers; (220.4000) Microstructure fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
