Title :
Electro thermal and electro statical actuation of a surface micromachined tunable Fabry-Pérot filter
Author :
Gierl, C. ; Zogal, K. ; Davani, H.A. ; Meissner, P.
Author_Institution :
Tech. Univ. Darmstadt, Darmstadt, Germany
Abstract :
We present a surface micromachined electro-thermal as well as electro-statical tunable Fabry-Perot filter for on wafer mass production. With insertion losses <; 1.4 dB (from standard single mode fiber (SSMF) to SSMF) and a tuning range of 112 nm.
Keywords :
Fabry-Perot resonators; distributed Bragg reflectors; microlenses; micromachining; micromirrors; optical fabrication; optical filters; optical losses; optical tuning; dielectric bragg reflectors; electrostatical actuation; electrothermal actuation; insertion loss; lens system; surface-micromachined tunable Fabry-Perot filter; wafer mass production; Electrodes; Insertion loss; Mirrors; Modulation; Optical device fabrication; Optical losses; Tuning;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
