Continuously-varying, three-dimensional SU-8 structures: fabrication of inclined magnetic actuators

A fabrication approach using SU-8 epoxy photoresist to create three-dimensional structures with continuous variation in the third dimension has been developed. Using this approach, a ramp structure 300 /spl mu/m tall with an angle of inclination of 36 degrees has been fabricated. In an extension of the process, both metal and dielectric materials can be deposited and patterned on the inclined surface. The current application for these ramp structures is the fabrication of magnetic switches of well-defined inclination relative to the substrate. Such switches were produced using the ramp structures as an underlying mechanical support. Switch arrays with inclined orientation are able to actuate consistently in the same direction in response to external magnetic fields. Under magnetic actuation, the switch produced a contact resistance of 5.1 /spl Omega/.