Title :
Thermo-kinetic actuation for hinged structure batch microassembly
Author :
Kaajakari, V. ; Lal, A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
Abstract :
Surface micromachined hinged flaps are assembled using thermo-kinetic forces in the molecular gas flow regime. Ultrasonic vibration energy is used to reduce static friction. The effective thermo-kinetic force is characterized as a function of pressure and temperature. The transition from the viscous to molecular flow regime is found to be flap size dependent. In the molecular flow regime the thermo-kinetic forces increase with increasing pressure and surface temperature. A suction based assembly jig suitable for automated MEMS batch assembly is also demonstrated.
Keywords :
actuators; batch processing (industrial); microassembling; micromechanical devices; stiction; ultrasonic applications; 2.5 MHz; automated MEMS batch assembly; flap size dependence; hinged structure batch microassembly; molecular gas flow regime; radiometer effect; static friction reduction; suction based assembly jig; surface micromachined hinged flaps; surface micromachines; surface temperature; thermo-kinetic actuation; thermo-kinetic forces; ultrasonic vibration energy; viscous to molecular flow regime transition; Assembly; Frequency; Friction; Kinetic theory; Microassembly; Micromechanical devices; Microstructure; Radiometry; Temperature; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984238
