Thermo-kinetic actuation for hinged structure batch microassembly

Author

Kaajakari, V. ; Lal, A.

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

196

Lastpage

199

Abstract

Surface micromachined hinged flaps are assembled using thermo-kinetic forces in the molecular gas flow regime. Ultrasonic vibration energy is used to reduce static friction. The effective thermo-kinetic force is characterized as a function of pressure and temperature. The transition from the viscous to molecular flow regime is found to be flap size dependent. In the molecular flow regime the thermo-kinetic forces increase with increasing pressure and surface temperature. A suction based assembly jig suitable for automated MEMS batch assembly is also demonstrated.

Keywords

actuators; batch processing (industrial); microassembling; micromechanical devices; stiction; ultrasonic applications; 2.5 MHz; automated MEMS batch assembly; flap size dependence; hinged structure batch microassembly; molecular gas flow regime; radiometer effect; static friction reduction; suction based assembly jig; surface micromachined hinged flaps; surface micromachines; surface temperature; thermo-kinetic actuation; thermo-kinetic forces; ultrasonic vibration energy; viscous to molecular flow regime transition; Assembly; Frequency; Friction; Kinetic theory; Microassembly; Micromechanical devices; Microstructure; Radiometry; Temperature; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984238

Filename

984238