DocumentCode
2252644
Title
Addressing the needs of complex MEMS design
Author
Clark, J.V. ; Bindel, D. ; Kao, W. ; Zhu, E. ; Kuo, A. ; Zhou, N. ; Nie, J. ; Demmel, J. ; Bai, Z. ; Govindjee, S. ; Pister, K.S.J. ; Gu, M. ; Agogino, A.
Author_Institution
Dept. of Appl. Sci. & Technol., California Univ., Berkeley, CA, USA
fYear
2002
fDate
24-24 Jan. 2002
Firstpage
204
Lastpage
209
Abstract
In this paper, we report several advances in the Sugar2.0 MEMS system simulation package, including reduced-order modeling techniques, simple hierarchical description of complex structures, synthesis tools, a variety of models, and a web-based interface. Examples include the modeling of a torsional micromirror with lateral actuators compared to experiment, and the prototyping of a microrobot.
Keywords
CAD; micro-optics; microactuators; micromechanical devices; microrobots; mirrors; reduced order systems; CAD; MEMS design; Sugar2.0 package; complex structure; computer simulation; hierarchical model; lateral actuator; microrobot prototyping; reduced-order model; synthesis tool; torsional micromirror; web-based interface; Actuators; Computational modeling; Computer science; Design automation; Equations; Mathematical model; Micromechanical devices; Micromirrors; Packaging; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location
Las Vegas, NV, USA
ISSN
1084-6999
Print_ISBN
0-7803-7185-2
Type
conf
DOI
10.1109/MEMSYS.2002.984240
Filename
984240
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