Title :
Validating fast simulation of air damping in micromachined devices
Author :
Xin Wang ; Judy, M. ; White, J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
Optimization of the dynamic performance of air-packaged micromachined devices requires accurate estimation of viscous drag forces, but such simulations can be prohibitively time-consuming if the finite element method (FEM) or the finite difference method (FDM) is used. The recently developed precorrected-FFT accelerated boundary element method (BEM) solver FastStokes has made substantial changes to this situation. To further determine the accuracy of the FastStokes solver, the simulation results of the ADXL76 accelerometer and a micro-mirror are discussed in this paper. Close matches between simulation results and testing results prove the efficiency and broad applicability of this fast Stokes flow solver.
Keywords :
accelerometers; boundary-elements methods; damping; drag; fast Fourier transforms; flow simulation; micro-optics; micromechanical devices; viscosity; ADXL76 accelerometer; FastStokes simulation; MEMS; Stokes flow; air damping; air-packaged micromachined devices; dynamic performance optimization; micro-mirror; precorrected-FFT accelerated boundary element method solver; simulation results; testing results; viscous drag forces; Acceleration; Boundary element methods; Damping; Finite difference methods; Geometry; Integral equations; Iterative algorithms; Kernel; Navier-Stokes equations; Packaging;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984241
