Title :
A double-sided single-chip wireless pressure sensor
Author :
DeHennis, A. ; Wise, K.D.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper presents the design and realization of a single-chip wireless pressure sensor implementing battery-free passive telemetry for transcutaneous pressure monitoring. The device is realized using a double-sided silicon-on-glass process integrating a high-Q inductor and a capacitive pressure transducer on opposite sides of a glass substrate. Batch-fabricated gold beam-lead inter-connects provide low-impedance connections from the front to the back of the glass die. The fabricated device measures 6 mm/spl times/6 mm/spl times/0.5 mm, and can be read out at distances greater than 3 cm over a pressure range of 400 mmHg to 1000 mmHg.
Keywords :
beam-lead devices; biomedical electronics; biomedical telemetry; biomedical transducers; brain; capacitive sensors; microsensors; patient monitoring; pressure sensors; 0.5 mm; 3 cm; 400 to 1000 mmHg; 6 mm; Au; Si; batch-fabricated Au beam-lead interconnects; battery-free passive telemetry; capacitive pressure transducer; double-sided silicon-on-glass process; double-sided single-chip wireless pressure sensor; glass substrate; high-Q inductor; low-impedance connections; pressure range; transcutaneous pressure monitoring; Biomedical measurements; Coupling circuits; Glass; Inductors; Log periodic antennas; Mutual coupling; Pressure measurement; Resonant frequency; Telemetry; Wireless sensor networks;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984250
