A double-sided single-chip wireless pressure sensor

This paper presents the design and realization of a single-chip wireless pressure sensor implementing battery-free passive telemetry for transcutaneous pressure monitoring. The device is realized using a double-sided silicon-on-glass process integrating a high-Q inductor and a capacitive pressure transducer on opposite sides of a glass substrate. Batch-fabricated gold beam-lead inter-connects provide low-impedance connections from the front to the back of the glass die. The fabricated device measures 6 mm/spl times/6 mm/spl times/0.5 mm, and can be read out at distances greater than 3 cm over a pressure range of 400 mmHg to 1000 mmHg.