Title :
Gas spectrometry based on pyroelectric thin film arrays integrated on silicon
Author :
Willing, B. ; Kohli, M. ; Muralt, P. ; Setter, N. ; Oehler, O.
Author_Institution :
Lab. de Ceramique, Ecole Polytech. Fed. de Lausanne, Switzerland
Abstract :
We report on a novel gas spectrometry technique using pyroelectric thin film arrays. The 1×50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements show both high voltage and current responses in defined frequency ranges. Mounting the array as a detector in a commercial spectrometer, we demonstrate its capability of detecting the infrared absorption lines of gases by the example of CO 2
Keywords :
elemental semiconductors; infrared detectors; infrared spectroscopy; microsensors; pyroelectric detectors; silicon; spectrometer accessories; Si; current response; gas spectrometry technique; infrared absorption line detection; membrane structure; pyroelectric thin film arrays; voltage response; Biomembranes; Frequency; Gas detectors; Infrared detectors; Pyroelectricity; Sensor arrays; Silicon; Spectroscopy; Transistors; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635455
