Title :
Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers
Author :
Yee, J.K. ; Yang, H.H. ; Judy, J.W.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
We have designed, fabricated, and tested ferromagnetic micromechanical magnetometers and have characterized their dynamic response and shock resistance. The magnetometer design is similar to a compass consisting of a ferromagnetic plate and a pair of torsion beams. The susceptibility of these MEMS magnetometers to squeeze film damping is analyzed and compared to experimental results. The torsion beam geometry of the magnetometer is such that longer beams can be used to obtain a higher magnetic sensitivity without compromising device shock resistance.
Keywords :
dynamic response; magnetic sensors; magnetometers; microsensors; shock waves; torsion; MEMS magnetometers; dynamic response; ferromagnetic micromechanical magnetometers; ferromagnetic plate; magnetic sensitivity; magnetometer design; shock resistance; squeeze film damping susceptibility; torsion beam geometry; torsion beams; Damping; Electric shock; Geometry; Magnetic analysis; Magnetic devices; Magnetic films; Magnetic susceptibility; Magnetometers; Micromechanical devices; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984264
