Title :
SU-8 based piezoresistive mechanical sensor
Author :
Thaysen, J. ; Yalcinkaya, A.D. ; Vestergaard, R.K. ; Jensen, S. ; Mortensen, M.W. ; Vettiger, P. ; Menon, A.
Author_Institution :
CANTION A/S, Tech. Univ. of Denmark, Lyngby, Denmark
Abstract :
We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. We demonstrate the chip fabrication, and characterization with respect to sensitivity, noise and device failure.
Keywords :
electron device noise; failure analysis; microsensors; molecular electronics; photoresists; piezoresistive devices; strain sensors; stress measurement; Au; MEMS; SU-8 based cantilever sensor; SU-8 based piezoresistive mechanical sensor; chip fabrication; device failure; gold resistor; high gauge factor; integrated piezoresistive readout; noise; piezoresistive material; sensitivity; Biosensors; Chip scale packaging; Gold; Immune system; Mechanical sensors; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon; Stress;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984267
