DocumentCode
2253310
Title
Combined Pirani/bending membrane-pressure sensor
Author
van Baar, J.J. ; Wiegerink, R.J. ; Lammerink, T.S.J. ; Berenschot, E. ; Krijnen, G.J.M. ; Elwenspoek, M.
Author_Institution
MESA Res. Inst., Twente Univ., Enschede, Netherlands
fYear
2002
fDate
24-24 Jan. 2002
Firstpage
328
Lastpage
331
Abstract
A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.
Keywords
membranes; microsensors; pressure sensors; Pirani pressure sensor; absolute pressure measurement; bending membrane pressure sensor; differential pressure sensor; membrane deflection measurement; pressure difference; sacrificial polysilicon layer; thermal readout; Biomembranes; Gas detectors; Heat sinks; Pressure measurement; Silicon; Temperature distribution; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location
Las Vegas, NV, USA
ISSN
1084-6999
Print_ISBN
0-7803-7185-2
Type
conf
DOI
10.1109/MEMSYS.2002.984269
Filename
984269
Link To Document