Title :
Combined Pirani/bending membrane-pressure sensor
Author :
van Baar, J.J. ; Wiegerink, R.J. ; Lammerink, T.S.J. ; Berenschot, E. ; Krijnen, G.J.M. ; Elwenspoek, M.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.
Keywords :
membranes; microsensors; pressure sensors; Pirani pressure sensor; absolute pressure measurement; bending membrane pressure sensor; differential pressure sensor; membrane deflection measurement; pressure difference; sacrificial polysilicon layer; thermal readout; Biomembranes; Gas detectors; Heat sinks; Pressure measurement; Silicon; Temperature distribution; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984269
