Title :
Optical inspection of ITO conducting glass with optical coherence tomography
Author :
Chang, Feng-Yu ; Tsai, Meng-Tsan
Author_Institution :
Dept. of Electr. Eng., Chang Gung Univ., Taoyuan, Taiwan
Abstract :
A new approach for defect inspection and properties evaluation of indium tin oxide (ITO) conducting glass is demonstrated with optical coherence tomography (OCT). With OCT scanning, the defects can be clearly identified at the different depths. Besides the morphological information, several parameters also can be estimated including the thickness of glass, group refractive index, reflection coefficient and transmission coefficient, which can be used to evaluate the quality of ITO conducting glass. From the results, one can see that OCT could be a potential imaging tool for defect inspection of ITO conducting glass or other industrial products.
Keywords :
glass; image segmentation; indium compounds; noncrystalline defects; optical engineering computing; optical tomography; refractive index; tin compounds; ITO; conducting glass; defect inspection; glass thickness; group refractive index; optical coherence tomography; optical inspection; reflection coefficient; transmission coefficient; Glass; Indium tin oxide; Optical imaging; Optical reflection; Optical variables control; Substrates; Three dimensional displays;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
