Title :
Underwater shear-stress sensor
Author :
Yong Xu ; Fukang Jiang ; Qiao Lin ; Clendenen, J. ; Tung, S. ; Yu-Chong Tai
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
Abstract :
This paper reports the development of a micromachined, vacuum-cavity insulated, thermal shear-stress sensor for underwater applications. We focus on two major challenges for underwater shear-stress sensors: the waterproof coating and pressure sensitivity. It is found that thin-film CVD Parylene is a good waterproof material and sensors coated with 2 /spl mu/m Parylene N can survive in water for at least one month at 55/spl deg/C. It is also found that reducing the size and increasing the thickness of the sensor diaphragm are effective in minimizing the pressure sensitivity.
Keywords :
diaphragms; micromachining; microsensors; strain sensors; stress measurement; thermal insulation; underwater vehicles; 2 micron; 55 C; Parylene N; fluid dynamic monitoring; micromachined vacuum-cavity insulated thermal shear-stress sensor; polysilicon resistor; pressure sensitivity; radio-controlled submarines; sensor diaphragm size; sensor diaphragm thickness; thin-film CVD Parylene; torpedoes; underwater shear-stress sensor; waterproof coating; Coatings; Insulation; Moisture; Polymers; Resistors; Temperature sensors; Testing; Thermal sensors; Thermal stresses; Underwater vehicles;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984272
