Title :
Two-Wavelength Snap-Shot Interferometer for Disturbance-Free Step-Height Measurement
Author :
Suzuki, T. ; Takahashi, H. ; Yokoyama, K. ; Sasaki, O.
Author_Institution :
Fac. of Eng., Niigata Univ., Niigata
Abstract :
Two-wavelength interferometer that is applicable to step-height measurement under the large disturbance is proposed and demonstrated. A step-height of 2 mum was measured for the high-speed rotating object without any special devices. The applicable rotating speed reached over 1000 rpm in our demonstration.
Keywords :
height measurement; light interferometry; disturbance-free step-height measurement; high-speed rotating object; large disturbance; two-wavelength snap-shot interferometer; Charge coupled devices; Charge-coupled image sensors; High speed optical techniques; High-speed electronics; Laser beams; Optical feedback; Optical interferometry; Rotation measurement; Vibration measurement; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391799
