Title :
Characterization of bulk micromachined tunneling tip integrated with positioning actuator
Author :
Mita, M. ; Toshiyoshi, H. ; Kakushima, K. ; Hashiguchi, G. ; Kobayashi, D. ; Endo, J. ; Wada, Y. ; Fujita, H.
Author_Institution :
University of Tokyo, Japan
Abstract :
We have successfully fabricated a tunneling tip integrated with a silicon micromachined electrostatic actuator of high aspect ratio. Tip sharpness has been investigated by scanning over carbon graphite as an atom scale.
Keywords :
electrostatic actuators; micromachining; position control; scanning tunnelling microscopy; C; Si; bulk micromachining; carbon graphite; electrostatic actuator; high aspect ratio structure; positioning actuator; tunneling tip; Artificial intelligence; Bridges; Electrostatic actuators; Etching; Fabrication; Scanning electron microscopy; Shape control; Silicon; Spectroscopy; Tunneling;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984275
