Title :
Micromachined hot-filament ionization pressure sensor and magnetometer
Author :
Williams, Kirt R. ; Muller, Richard S.
Author_Institution :
Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Abstract :
Two new micromachined sensors, an ionization pressure sensor (ion gauge) and magnetic-field sensor, were fabricated and tested. Both sensors employ electrons thermionically emitted from a hot tungsten filament for sensing and are built using the same fabrication process
Keywords :
magnetic sensors; magnetometers; micromachining; microsensors; pressure sensors; fabrication process; ion gauge; ionization pressure sensor; magnetic-field sensor; micromachined sensors; thermionically emitted electrons; Actuators; Dielectric substrates; Electron emission; Ionization; Magnetic sensors; Magnetometers; Resists; Silicon; Thermal stresses; Tungsten;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635461
