• DocumentCode
    2253677
  • Title

    Application of direct selective metal plating

  • Author

    Konishi, S. ; Yanada, M. ; Minami, I. ; Kimura, Y. ; Ikeda, S.

  • Author_Institution
    Ritsumeikan Univ., Shiga, Japan
  • fYear
    2002
  • fDate
    24-24 Jan. 2002
  • Firstpage
    396
  • Lastpage
    399
  • Abstract
    This paper describes the application of a direct selective metal plating technology. A direct selective metal plating technology allows a growth of metal plating on a part where a seed material is drawn. A direct drawing method can be applied for various surfaces where it is not suitable for a conventional method based on a photolithography technology. A drawing system is constructed in order to apply the technology to three dimensional structure in this study. A fabrication of a multi layer circuit will be reported at first. Next, plating metal patterns on a various three dimensional structures will be demonstrated. Furthermore, plating a metal pattern on a ball will be reported. This result promises a possibility that a direct selective metal plating can also be applied to so called ball semiconductor technology at rather large scale.
  • Keywords
    drawing (mechanical); electroplating; micromachining; ball semiconductor technology; direct selective metal plating; drawing system; micromachining; multilayer circuit fabrication; seed material; three-dimensional structure; Chemical technology; Circuits; Fabrication; Inorganic materials; Large-scale systems; Lithography; Micromachining; Microstructure; Printing; Prototypes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7185-2
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2002.984286
  • Filename
    984286