DocumentCode
2253677
Title
Application of direct selective metal plating
Author
Konishi, S. ; Yanada, M. ; Minami, I. ; Kimura, Y. ; Ikeda, S.
Author_Institution
Ritsumeikan Univ., Shiga, Japan
fYear
2002
fDate
24-24 Jan. 2002
Firstpage
396
Lastpage
399
Abstract
This paper describes the application of a direct selective metal plating technology. A direct selective metal plating technology allows a growth of metal plating on a part where a seed material is drawn. A direct drawing method can be applied for various surfaces where it is not suitable for a conventional method based on a photolithography technology. A drawing system is constructed in order to apply the technology to three dimensional structure in this study. A fabrication of a multi layer circuit will be reported at first. Next, plating metal patterns on a various three dimensional structures will be demonstrated. Furthermore, plating a metal pattern on a ball will be reported. This result promises a possibility that a direct selective metal plating can also be applied to so called ball semiconductor technology at rather large scale.
Keywords
drawing (mechanical); electroplating; micromachining; ball semiconductor technology; direct selective metal plating; drawing system; micromachining; multilayer circuit fabrication; seed material; three-dimensional structure; Chemical technology; Circuits; Fabrication; Inorganic materials; Large-scale systems; Lithography; Micromachining; Microstructure; Printing; Prototypes;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location
Las Vegas, NV, USA
ISSN
1084-6999
Print_ISBN
0-7803-7185-2
Type
conf
DOI
10.1109/MEMSYS.2002.984286
Filename
984286
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