DocumentCode
2253850
Title
Exploring the frontiers of optoelectronics with FIB technology
Author
Steckl, A.J.
Author_Institution
Nanoelectron. Lab., Cincinnati Univ., OH, USA
fYear
1997
fDate
6-11 Jan 1997
Firstpage
47
Lastpage
50
Abstract
A review of the current and potential future uses of FIB technology for the fabrication of optoelectronic devices and circuits is presented. The advantages of the maskless and resistless FIB fabrication are briefly reviewed. A DBR laser totally fabricated by FIB (both gratings and channel waveguide) is discussed as an example of FIB-fabricated optoelectronic components. The opportunities and challenges of future applications of FIB technology in fiber-optic communications optoelectronics are considered. In this application, components such as WDM laser sources, add/drop filters, waveguides, and combiners can be ideally fabricated in an integrated optoelectronic circuit by FIB
Keywords
distributed Bragg reflector lasers; focused ion beam technology; integrated optoelectronics; ion implantation; optical fabrication; DBR laser; FIB technology; WDM laser source; add/drop filter; channel waveguide; combiner; fabrication; fiber-optic communication; grating; integrated optoelectronic circuit; optoelectronics; Communications technology; Distributed Bragg reflectors; Fiber lasers; Gratings; Integrated circuit technology; Optical device fabrication; Optical fiber communication; Optoelectronic devices; Waveguide components; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Frontiers in Electronics, 1997. WOFE '97. Proceedings., 1997 Advanced Workshop on
Conference_Location
Puerto de la Cruz
Print_ISBN
0-7803-4059-0
Type
conf
DOI
10.1109/WOFE.1997.621143
Filename
621143
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