Title :
A micro lens actuator for optical flying head
Author :
Hata, S. ; Yamada, Y. ; Ichihara, J. ; Shimokohbe, A.
Author_Institution :
Precision & Intelligence Lab., Tokyo Inst. of Technol., Japan
Abstract :
In relation to high capacity magneto-optical recording, a new electrostatic actuator, which is called a micro lens actuator (MLA), for an optical flying head (OFH) has been designed and fabricated. The MLA is characterized by its moving electrode made of a Pd-based thin film metallic glass ( Pd/sub 76/Cu/sub 7/Si/sub 17/). Annealing in the supercooled liquid region (SCLR) is adopted for relaxation of internal stress in the moving electrode to fabricate a huge, flat and thin moving electrode plate. The experimental MLA shows 0.85 /spl mu/m/50 V maximum stroke, 0.02 degree tilt error and 3.55 kHz resonance frequency.
Keywords :
annealing; electrostatic actuators; magneto-optical recording; metallic glasses; microlenses; micromechanical resonators; stress relaxation; 3.55 kHz; Pd-based thin film metallic glass; Pd/sub 76/Cu/sub 7/Si/sub 17/; annealing; electrostatic actuator; high capacity magneto-optical recording; huge flat thin moving electrode plate; internal stress relaxation; maximum stroke; micro lens actuator; moving electrode; optical flying head; resonance frequency; supercooled liquid region; tilt error; voltage-displacement characteristics; Electrodes; Electrostatic actuators; Glass; Lenses; Magnetic heads; Magnetooptic recording; Optical design; Optical films; Optical recording; Semiconductor thin films;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984320
