A novel high-speed piezoelectric deformable varifocal mirror for optical applications

Author

Mescher, M.J. ; Vladimer, M.L. ; Bernstein, J.J.

Author_Institution

Charles Stark Draper Lab. Inc., Cambridge, MA, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

511

Lastpage

515

Abstract

We describe the characteristics of a microelectromechanical deformable optical component: a parabolic focusing mirror having a focal length that is controlled by piezoelectric actuation of thin-film PZT. Devices of two different sizes were tested and have resonant frequencies in the low MHz range, nominal focal lengths between 1500 and 2000 /spl mu/m and numerical apertures of approximately 0.10 and 0.05. Tuning ranges of several hundred microns have been demonstrated. Finite element modeling is described and compared to measured results. The equations required for device scaling are provided to show some of the tradeoffs that can be made between aperture size, mechanical bandwidth and focal length tuning range.

Keywords

finite element analysis; micro-optics; mirrors; optical focusing; piezoelectric actuators; 1500 to 2000 /spl mu/m; device scaling; equations; finite element modeling; focal length; focal length tuning; focal lengths; mechanical bandwidth; microelectromechanical deformable optical component; parabolic focusing mirror; piezoelectric actuation; thin-film PZT; Apertures; Finite element methods; Mirrors; Optical control; Optical devices; Optical films; Piezoelectric films; Resonant frequency; Testing; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984321

Filename

984321