Title :
Micro-replication of optical lenses in glass using a novel sol gel technology
Author :
Sayah, A. ; Parashar, V.K. ; Gijs, M.A.M.
Author_Institution :
Inst. of Microsyst., Swiss Fed. Inst. of Technol. Lausanne (EPFL), Switzerland
Abstract :
A new method to realize arrays of microlenses using a sol gel glass replication technology is presented. Polydimethyl-siloxane (PDMS) master structures are used for the replication of thin glass membranes, which, by an appropriate annealing procedure, result in converging lenses with positive meniscus. Hereby, we exploit PDMS - sol gel surface interactions and thickness dependent changes in composition of the sol gel solution. The lenses are realized on a circular and square like basis. We characterize the micro-lenses by an optical imaging system and measure their focal length as a function of lens thickness and size. Also lens interference effects are measured.
Keywords :
microlenses; optical fabrication; optical glass; optical variables measurement; polymer solutions; replica techniques; sol-gel processing; glass microlenses; interference effect; membrane thickness; microfabrication; sol gel glass; surface interactions; Annealing; Biomembranes; Glass; Interference; Length measurement; Lenses; Microoptics; Optical imaging; Size measurement; Thickness measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984322