Title :
Electrostatic digital micromirror using interdigitated cantilevers
Author :
Jin-Wan Jeon ; Byeong-Il Kim ; Ji-hyuk Kim ; Hyung-kew Lee ; Jun-Bo Yoon ; Euisik Yoon ; Koeng Su Lim
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol. (KAIST), Taejon, South Korea
Abstract :
We have proposed an electrostatic digital micromirror utilizing interdigitated cantilevers. The electrostatically-actuated microstructure has been fabricated by the electroplated-nickel surface micromachining. Thanks to the unique design of the interdigitated cantilevers, the micromirror has an operational mechanism of a seesaw allowing accurate, reliable control of the final rotating angle. The fabricated digital micromirror has shown the rotating angle of /spl plusmn/9 degrees with an actuation voltage of 60 V.
Keywords :
electroplated coatings; electrostatic actuators; micro-optics; micromachining; mirrors; optical fabrication; 60 V; Ni; electroplated nickel surface micromachining; electrostatic digital micromirror; electrostatically actuated microstructure; fabrication method; interdigitated cantilevers; Displays; Electrodes; Electrostatics; Fabrication; Micromirrors; Mirrors; Optical modulation; Printers; Springs; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984325
