A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

Author

Il-Joo Cho ; Kwang-Seok Yun ; Hyung-Kew Lee ; Jun-Bo Yoon ; Euisik Yoon

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol. (KAIST), Taejon, South Korea

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

540

Lastpage

543

Abstract

In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as /spl plusmn/4.35/spl deg/ for x-axis actuation and /spl plusmn/15.7/spl deg/ for y-axis actuation. The actuation voltages are below 4.2 V for x-axis actuation and 1.76 V for y-axis actuation, respectively.

Keywords

electromagnetic actuators; elemental semiconductors; low-power electronics; micro-optics; mirrors; silicon; torsion; 1.76 V; 4.2 V; Cu; Si; bulk silicon mirror plate; bulk silicon torsion bar; deflection angle; electromagnetic actuation; electroplated copper coil; low-voltage two-axis micromirror; magnetic field; Bars; Coils; Copper; Electromagnetic measurements; Goniometers; Low voltage; Magnetic field measurement; Micromirrors; Mirrors; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984328

Filename

984328