Title :
A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars
Author :
Il-Joo Cho ; Kwang-Seok Yun ; Hyung-Kew Lee ; Jun-Bo Yoon ; Euisik Yoon
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol. (KAIST), Taejon, South Korea
Abstract :
In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as /spl plusmn/4.35/spl deg/ for x-axis actuation and /spl plusmn/15.7/spl deg/ for y-axis actuation. The actuation voltages are below 4.2 V for x-axis actuation and 1.76 V for y-axis actuation, respectively.
Keywords :
electromagnetic actuators; elemental semiconductors; low-power electronics; micro-optics; mirrors; silicon; torsion; 1.76 V; 4.2 V; Cu; Si; bulk silicon mirror plate; bulk silicon torsion bar; deflection angle; electromagnetic actuation; electroplated copper coil; low-voltage two-axis micromirror; magnetic field; Bars; Coils; Copper; Electromagnetic measurements; Goniometers; Low voltage; Magnetic field measurement; Micromirrors; Mirrors; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984328
