A scanning micromirror with angular comb drive actuation

Author

Patterson, P.R. ; Dooyoung Hah ; Hung Nguyen ; Toshiyoshi, H. ; Ru-min Chao ; Wu, M.C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

544

Lastpage

547

Abstract

Describes a single crystal silicon, 1/spl times/1 mm/sup 2/, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical comb show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electromechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of /spl plusmn/18/spl deg/ at 1.4 kHz has been measured.

Keywords

micro-optics; microactuators; mirrors; silicon-on-insulator; 1.4 kHz; SOI MEMS; Si; angular vertical comb drive actuator; resonant mode; scan angle; scanning micromirror; self-alignment; silicon on insulator micro-electromechanical systems; static deflection; Actuators; Costs; Microelectromechanical systems; Micromechanical devices; Micromirrors; Optical devices; Resonance; Semiconductor device modeling; Silicon on insulator technology; Teeth;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984329

Filename

984329