2D micro scanner actuated by sol-gel derived double layered PZT

Author

Tsaur, J. ; Lulu Zhang ; Maeda, R. ; Matsumoto, S.

Author_Institution

Integrated Solid-State Electro Mech. Instruments, Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

548

Lastpage

551

Abstract

2D micro scanners actuated by sol-gel derived double layered PZT actuators were designed and fabricated. In our previous work, the better scanning capability of double layered PZT structures has been investigated. The purpose of this paper is to determine 1D and 2D scanning characteristics of 2D micro scanners with respect to resonant actuations. While resonating with 7.5 V at 3750 Hz and 5350 Hz, the scanning angle of 26/spl plusmn/2 degrees and 24/spl plusmn/2 degrees were obtained. Furthermore, the new fabrication process greatly improved the residual stress of suspended structures due to the compensation effect of double layered PZT. Wet etching process for PZT not only amended the uniformity, but also increased the device yield economically.

Keywords

compensation; etching; internal stresses; lead compounds; microactuators; piezoelectric actuators; sol-gel processing; 2D micro scanner; 3750 Hz; 5350 Hz; 7.5 V; PZT; PZT actuators; PbZrO3TiO3; compensation effect; device yield; fabrication process; residual stress; resonant actuations; scanning angle; scanning characteristics; sol-gel derived double layered actuators; suspended structures; wet etching process; Actuators; Capacitive sensors; Electrothermal effects; Fabrication; Frequency; Mirrors; Residual stresses; Resonance; Thermal stresses; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984330

Filename

984330