Title :
A highly dense MEMS optical switch array integrated with planar lightwave circuit
Author :
Kanie, T. ; Katayama, M. ; Shiozaki, M. ; Komiya, T. ; Saitoh, K. ; Nishimura, M.
Author_Institution :
Sumitomo Electr. Industries, Ltd, Kanagawa, Japan
Abstract :
We propose a novel MEMS 2/spl times/2 optical switch array integrated with a Planar Lightwave Circuit (PLC) for application to Optical Add Drop Multiplexing (OADM) in Wavelength Division Multiplexed (WDM) transmission systems. This switch array consists of two chips connected together by flip chip bonding. One is the MEMS device which has 16 channel latched silicon actuators with micro-mirrors, and the other is a PLC which has a 16 channel 2 /spl times/ 2 cross type waveguide array. In order to achieve highly dense integration, the MEMS actuator has a long beam cantilever arranged with a 500 /spl mu/m period.
Keywords :
flip-chip devices; integrated optics; integrated optoelectronics; micro-optics; microactuators; micromechanical resonators; optical arrays; optical switches; wavelength division multiplexing; 16-channel latched silicon actuators; 500 micron; MEMS 2/spl times/2 optical switch array; WDM transmission systems; cross type waveguide array; flip chip bonding; highly dense integration; long beam cantilever; micro-mirrors; optical add drop multiplexing; planar lightwave circuit; Actuators; Circuits; Flip chip; Integrated optics; Micromechanical devices; Optical add-drop multiplexers; Optical arrays; Optical switches; Programmable control; Wavelength division multiplexing;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984333
