A highly dense MEMS optical switch array integrated with planar lightwave circuit

Author

Kanie, T. ; Katayama, M. ; Shiozaki, M. ; Komiya, T. ; Saitoh, K. ; Nishimura, M.

Author_Institution

Sumitomo Electr. Industries, Ltd, Kanagawa, Japan

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

560

Lastpage

563

Abstract

We propose a novel MEMS 2/spl times/2 optical switch array integrated with a Planar Lightwave Circuit (PLC) for application to Optical Add Drop Multiplexing (OADM) in Wavelength Division Multiplexed (WDM) transmission systems. This switch array consists of two chips connected together by flip chip bonding. One is the MEMS device which has 16 channel latched silicon actuators with micro-mirrors, and the other is a PLC which has a 16 channel 2 /spl times/ 2 cross type waveguide array. In order to achieve highly dense integration, the MEMS actuator has a long beam cantilever arranged with a 500 /spl mu/m period.

Keywords

flip-chip devices; integrated optics; integrated optoelectronics; micro-optics; microactuators; micromechanical resonators; optical arrays; optical switches; wavelength division multiplexing; 16-channel latched silicon actuators; 500 micron; MEMS 2/spl times/2 optical switch array; WDM transmission systems; cross type waveguide array; flip chip bonding; highly dense integration; long beam cantilever; micro-mirrors; optical add drop multiplexing; planar lightwave circuit; Actuators; Circuits; Flip chip; Integrated optics; Micromechanical devices; Optical add-drop multiplexers; Optical arrays; Optical switches; Programmable control; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984333

Filename

984333