Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

Author

Kowarz, M.W. ; Brazas, J.C., Jr. ; Phalen, J.G.

Author_Institution

Integrated Mater. & Microstructures Lab., Eastman Kodak Co., Rochester, NY, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

568

Lastpage

573

Abstract

A diffractive optical MEMS device for spatial and temporal light modulation is described that is capable of high-speed digital operation. The device contains electromechanical ribbons suspended flat above a silicon substrate by a periodic series of intermediate supports. When actuated electrostatically, the ribbons conform around the support substructure to produce a grating. The device has optical switching times of less than 50 nsec, sub-nanosecond jitter, high optical contrast and efficiency, and reliable actuation in contact mode. The fine gray levels needed for digital imaging systems are produced by pulse width modulation.

Keywords

diffraction gratings; electro-optical switches; electrostatic actuators; high-speed optical techniques; jitter; micro-optics; optical arrays; pulse width modulation; spatial light modulators; 50 ns; Si; Si substrate; conformal grating electromechanical system; diffractive optical MEMS device; digital imaging systems; electromechanical ribbons; electrostatic actuation; fine gray levels; high optical contrast; high-speed digital light modulation; optical switching times; periodic intermediate supports; pulse width modulation; reliable contact mode actuation; spatial light modulation; spatial light modulator; sub-nanosecond jitter; support substructure; temporal light modulation; throughput; Digital modulation; Electromechanical systems; Gratings; High speed optical techniques; Microelectromechanical devices; Optical devices; Optical diffraction; Optical modulation; Pulse width modulation; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984335

Filename

984335