Compact copper/epoxy-based electromagnetic scanner for scanning probe applications

Author

Rothuizen, H. ; Despont, M. ; Drechsler, U. ; Genolet, G. ; Haberle, W. ; Lutwyche, M. ; Stutz, R. ; Vettiger, P.

Author_Institution

IBM Zurich Res. Lab., Ruschlikon, Switzerland

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

582

Lastpage

585

Abstract

We report on the fabrication of a flat X/Y/Z microscanner that uses flexible rubber posts as a spring system and planar coils embedded in an epoxy body for electromagnetic actuation. The device is primarily intended for motion in the X-Y plane, in which it can scan a 100 /spl mu/m displacement range with about 3 mW of power. Various shapes of the posts are considered in order to adjust the ratios of stiffnesses for in-plane and out-of-plane motion.

Keywords

coils; copper; electromagnetic actuators; filled polymers; image scanners; microactuators; permanent magnets; scanning probe microscopy; Cu; Cu/epoxy-based electromagnetic scanner; SmCo; SmCo magnets; X-Y plane motion; displacement range; electromagnetic actuation; epoxy body; epoxy-based SU-8 resist; flat X/Y/Z microscanner; flexible rubber posts; in-plane motion; out-of-plane motion; planar coils; polydimethylsiloxane posts; post shapes; scanning probe applications; spring system; stiffness ratios; Coils; Copper; Fabrication; Magnetic field measurement; Magnets; Probes; Resists; Rubber; Shape; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984338

Filename

984338