Title :
Development of SiCN ceramic thermal actuators
Author :
Liew, L.-A. ; Bright, V.M. ; Dunn, M.L. ; Daily, J.W. ; Raj, R.
Author_Institution :
Dept. of Mech. Eng., Colorado Univ., Boulder, CO, USA
Abstract :
Reports the development of electrically-conductive silicon carbon-nitride (SiCN) MEMS. SiCN is a new class of polymer-derived bulk ceramics for ultra-high temperature and corrosive environment applications; however, as-pyrolyzed SiCN is electrically insulating. This paper describes a process for fabricating SiCN MEMS that exhibit a room-temperature electrical resistivity of 5.5 ohm-cm, based on post-pyrolysis annealing at 1400/spl deg/C in a hot isostatic press in a nitrogen atmosphere. This integrated micromachining/materials-synthesis process enables the realization of a class of SiCN electro-then-no-mechanical devices not previously possible. SiCN thermal actuators and micro-grippers were fabricated to demonstrate an application of this functionalized material.
Keywords :
annealing; ceramics; microactuators; micromachining; silicon compounds; 1400 degC; 5.5 ohmcm; MEMS; SiCN; ceramic thermal actuators; electrically-conductive ceramics; electrothermomechanical devices; hot isostatic press; micro-grippers; polymer-derived bulk ceramics; post-pyrolysis annealing; room-temperature electrical resistivity; Actuators; Annealing; Ceramics; Dielectrics and electrical insulation; Electric resistance; Micromechanical devices; Plastic insulation; Polymers; Silicon; Temperature;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984340