Vertical motion microactuator based on the concept of ECLIA (Electrostatic Controlled Linear Inchworm Actuator)

A vertical motion microactuator is proposed, which moves in a vertical direction from the substrate. The microactuator is designed based on the concept of ECLIA (Electrostatic Controlled Linear Inchworm Actuator), so that it can provide the following features in vertical motion: stepwise linear motion, high accuracy, large stroke, large force, and parallel motion of arrayed actuators. A large number of sliders utilize an upward and downward motion of the driving energy source and move in a vertical direction independently. The vertical motion microactuator has been designed, fabricated and operated.