Title :
A large stepwise motion electrostatic actuator for a wireless microrobot
Author :
Basset, P. ; Kaiser, A. ; Bigotte, P. ; Collard, D. ; Buchaillot, L.
Author_Institution :
Dpt. ISEN, UMR CNRS, Villeneuve d´Ascq, France
Abstract :
An original large stepwise motion electrostatic microactuator for a wireless microrobot using a distributed Ciliary Motion System (CMS) [1] is presented. Coventorware/sup TM/ cosolver simulations have shown x-displacement of 240 nm for one actuation step. Design of the antennas for inductive powering has been optimized in order to maximize the energy transfer. 24 /spl mu/m gold electroplated hollow micro-coils have been fabricated on an epoxy substrate as receiver antennas. Q-factor of 29 at 13.56 MHz and induced voltage up to 100 V on a 1 k/spl Omega/ load has been obtained. Remote actuation of an array of actuators supporting a 0.25 mm/sup 2//380 /spl mu/m-thick piece of silicon has been successfully demonstrated with a pull-in voltage of 80 V.
Keywords :
Q-factor; electrostatic actuators; microrobots; superconducting coils; telerobotics; 100 V; 13.56 MHz; 24 micron; 380 micron; 80 V; Coventorware cosolver simulations; Q-factor; actuation step; distributed ciliary motion system; electroplated hollow micro-coils; energy transfer; induced voltage; inductive powering; pull-in voltage; receiver antennas; remote actuation; stepwise motion electrostatic actuator; wireless microrobot; Collision mitigation; Design optimization; Electrostatic actuators; Energy exchange; Gold; Microactuators; Q factor; Receiving antennas; Silicon; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984344
