A large stepwise motion electrostatic actuator for a wireless microrobot

Author

Basset, P. ; Kaiser, A. ; Bigotte, P. ; Collard, D. ; Buchaillot, L.

Author_Institution

Dpt. ISEN, UMR CNRS, Villeneuve d´Ascq, France

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

606

Lastpage

609

Abstract

An original large stepwise motion electrostatic microactuator for a wireless microrobot using a distributed Ciliary Motion System (CMS) [1] is presented. Coventorware/sup TM/ cosolver simulations have shown x-displacement of 240 nm for one actuation step. Design of the antennas for inductive powering has been optimized in order to maximize the energy transfer. 24 /spl mu/m gold electroplated hollow micro-coils have been fabricated on an epoxy substrate as receiver antennas. Q-factor of 29 at 13.56 MHz and induced voltage up to 100 V on a 1 k/spl Omega/ load has been obtained. Remote actuation of an array of actuators supporting a 0.25 mm/sup 2//380 /spl mu/m-thick piece of silicon has been successfully demonstrated with a pull-in voltage of 80 V.

Keywords

Q-factor; electrostatic actuators; microrobots; superconducting coils; telerobotics; 100 V; 13.56 MHz; 24 micron; 380 micron; 80 V; Coventorware cosolver simulations; Q-factor; actuation step; distributed ciliary motion system; electroplated hollow micro-coils; energy transfer; induced voltage; inductive powering; pull-in voltage; receiver antennas; remote actuation; stepwise motion electrostatic actuator; wireless microrobot; Collision mitigation; Design optimization; Electrostatic actuators; Energy exchange; Gold; Microactuators; Q factor; Receiving antennas; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984344

Filename

984344