Title :
CVD polycrystalline diamond high-Q micromechanical resonators
Author :
Jing Wang ; Butler, J.E. ; Hsu, D.S.Y. ; Nguyen, T.-C.
Author_Institution :
Center for Integrated Wireless Microsyst., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Chemical Vapor Deposited (CVD) polycrystalline diamond material, with an acoustic velocity higher than that of polycrystalline silicon, has been utilized as the structural material for clamped-clamped beam (CC-beam) micromechanical resonators with measured resonance frequencies from 2.7 MHz to 9.8 MHz, and Q´s up to 6,225-easily on par with that of previous polysilicon resonators in this frequency range. In addition to CC-beams, CVD polydiamond folded-beam /spl mu/mechanical resonators are also demonstrated with Q´s in the range of 20,000. With its higher acoustic velocity, polydiamond has great potential for more easily achieving the coveted UHF frequencies (0.3-3 GHz) required for use in wireless communication transceivers.
Keywords :
CVD coatings; diamond; elemental semiconductors; micromechanical resonators; mobile radio; transceivers; 0.3 to 3 GHz; 2.7 to 9.8 MHz; C; CVD polydiamond resonators; UHF frequencies; acoustic velocity; clamped-clamped beam; folded-beam microresonators; micromechanical resonators; polycrystalline diamond material; polycrystalline silicon; polysilicon resonators; resonance frequencies 2.7 MHz to 9.8 MHz; wireless communication transceivers; Acoustic beams; Acoustic materials; Acoustic measurements; Chemical vapor deposition; Frequency measurement; Micromechanical devices; Resonance; Resonant frequency; Silicon; Velocity measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984356
