A high Q, large tuning range, tunable capacitor for RF applications

Using a new, double-sided adhesive process, an analog tunable capacitor has been designed and fabricated with an extremely large tuning range and a high Q. New design components such as two-sided metal deposition, low resistivity silicon, thicker device layers, and double beam suspensions have improved RF performance drastically. In the 200-400 MHz range that this device is intended for, Q values are in excess of 100. In addition, an 8.4 to 1 tuning ratio has been achieved with continuous tuning over a 1.4 to 11.9 pF range. To further improve dynamic performance, devices were operated in a high viscosity gas environment and near critical damping was achieved.