Title :
3-D lithography and metal surface micromachining for RF and microwave MEMS
Author :
Jun-Bo Yoon ; Byeong-Il Kim ; Yun-Seok Choi ; Euisik Yoon
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
Abstract :
A new metal surface micromachining technology utilizing 3-D lithography, electroplating, and mechanical polishing has been developed to fabricate arbitrary 3-D metal microstructures as post-IC processes at low temperature below 120/spl deg/C. Using this technology, various highly-suspended 3-D microstructures have been successfully demonstrated for RF and microwave MEMS applications. We have fabricated spiral inductors suspended 100 /spl mu/m over the substrate, coplanar waveguides suspended 50 /spl mu/m over the substrate, and complicated micro-coaxial lines which have 50 /spl mu/m-suspended center signal lines surrounded by ground shields of 100 /spl mu/m in height.
Keywords :
coaxial cables; coplanar waveguides; electroplating; inductors; micromachining; micromechanical devices; polishing; ultraviolet lithography; 120 C; 3D lithography; 3D suspended microstructure; RF MEMS; coplanar waveguide; electroplating; ground shield; mechanical polishing; metal surface micromachining; micro-coaxial line; microwave MEMS; spiral inductor; Coplanar waveguides; Inductors; Lithography; Micromachining; Micromechanical devices; Microstructure; Microwave technology; Radio frequency; Spirals; Temperature;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984360
