DocumentCode :
2255179
Title :
Recording on PZT and AgInSbTe thin films for probe-based data storage
Author :
Dong Weon Lee ; Ono, T. ; Esashi, M.
Author_Institution :
Venture Bus. Lab., Tohoku Univ., Sendai, Japan
fYear :
2002
fDate :
24-24 Jan. 2002
Firstpage :
685
Lastpage :
688
Abstract :
In this paper, we propose microprobe-based electrical and thermal recording techniques for application to high-density data storage. A microheater integrated at the free end of a thermal microprobe is formed by diffusion of boron for 3 hrs at 1160/spl deg/C and is supported by two conductive silicon legs. When flowing a pulsed current through the legs, the heater is electrically heated in a short time. Primary experiments for electrical and thermal recording are evaluated using sol-gel processed PZT and AgInSbTe thin films as storage media. For electrical recording on the PZT film, a voltage pulse is applied between a conductive tip and the PZT film. The nano-sized ferroelectric domains are easily switched by the applied voltage. The smallest marks were below 100 nm in diameter, which correspond to bit densities over 70 Gb/in/sup 2/. For thermal recording on AgInSbTe, the conductive tip is Joule heated by flowing a current and then the heated tip undergoes a local phase change (amorphous to crystalline or crystalline to amorphous). To read the formed mark, we measure the electrical resistance between a bottom electrode of AgInSbTe and the conductive tip because the electrical resistance of the amorphous state is higher than that of the crystalline state.
Keywords :
amorphisation; chalcogenide glasses; crystallisation; electrical conductivity transitions; ferroelectric switching; ferroelectric thin films; indium compounds; lead compounds; scanning probe microscopy; semiconductor thin films; silver compounds; sol-gel processing; storage media; 1160 C; 3 h; AgInSbTe; AgInSbTe thin films; B diffusion; Joule heating; PZT; PZT thin films; PbZrO3TiO3; amorphous to crystalline transition; conductive silicon legs; conductive tip; crystalline to amorphous transition; electrical heating; electrical resistance; high-density data storage; integrated microheater; local phase change; microprobe-based electrical recording; microprobe-based thermal recording; nano-sized ferroelectric domain switching; probe-based data storage; pulsed current; sol-gel processed thin films; thermal microprobe; voltage pulse; Amorphous materials; Conductive films; Crystallization; Electric resistance; Ferroelectric films; Leg; Resistance heating; Thermal conductivity; Transistors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
ISSN :
1084-6999
Print_ISBN :
0-7803-7185-2
Type :
conf
DOI :
10.1109/MEMSYS.2002.984363
Filename :
984363
Link To Document :
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