Title :
New structure for DC-65 GHz thermal power sensor
Author :
Kodato, Setsuo ; Wakabayashi, Takashi ; Zhuang, Qingde ; Uchida, Seiji
Author_Institution :
Anritsu Corp., Kanagawa, Japan
Abstract :
We have developed a new structure thermopile-type thermal power sensor for the millimeter wave range (de to 65 GHz). It consists of a ceramic substrate, metal and microcrystalline-SiGe thin films. Both fast or high-sensitivity sensors can be manufactured
Keywords :
Ge-Si alloys; electric sensing devices; microsensors; millimetre wave detectors; semiconductor materials; thermopiles; ceramic substrate; high-sensitivity sensors; millimeter wave range; mm-wave power detection; thermal power sensor; thermopile-type sensor; Electric resistance; Frequency; Millimeter wave measurements; Power measurement; Resistance heating; Sensor phenomena and characterization; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635469
