DocumentCode :
2255546
Title :
2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)
fYear :
2001
fDate :
5-7 Dec. 2001
Keywords :
dielectric materials; micromechanical devices; microwave devices; nanotechnology; optoelectronic devices; organic semiconductors; semiconductor device models; semiconductor devices; semiconductor technology; silicon-on-insulator; submillimetre wave devices; wide band gap semiconductors; MEMS; SOI technology; SiC; THz devices; device research; dielectrics; high frequency devices; magnetics; nanoelectronics; nitrides; optoelectronics; organic semiconductors; oxides; silicon device modeling; silicon processing; wide band-gap materials;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Device Research Symposium, 2001 International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7432-0
Type :
conf
DOI :
10.1109/ISDRS.2001.984423
Filename :
984423
Link To Document :
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