Design and fabrication of 4H-SiC APD linear arrays

The photodetector linear array is an important technology for spectroscopic and imaging applications. In the visible blind UV region, 4H-SiC is a promising candidate for a linear array because of its high reliability and commercial availability of large area substrates. The 4H-SiC visible blind avalanche photodiodes (APDs) have been demonstrated, making it possible to demonstrate -visible blind APD linear array for applications where the UV signal is weak. In this paper, we present the detailed design and fabrication issues. Detailed characterizations results and suggestions for further improvement and potential applications are also presented.