Title :
Group III-nitride devices for field effect based gas detection
Author :
Eickhoff, M. ; Schalwig, J. ; Weidemann, O. ; Görgens, L. ; Muller, Gunter ; Stutzmann, M.
Author_Institution :
Walter Schottky Inst., Tech. Univ. Munich, Garching, Germany
fDate :
30 June-5 July 2002
Abstract :
We report about recent results on the sensor properties of novel gas-sensing devices based on group III-nitride materials. (Pt)-Schottky diodes as well as gas sensitive AlGaN/GaN heterostructure field effect transistors are characterized with respect to their temperature dependent sensitivity towards hydrogen and other oxidizing or reducing gases. Further investigation of the transient behaviour of gas sensitive (Pt)-GaN Schottky contacts reveals that up to device temperatures of 150°C hydrogen is stored on electronically active sites of the sensor system. We found hydrogen accumulation at the Pt/GaN interface accompanied by an accumulation of oxygen by elastic recoil detection analysis. GaN-based gas sensitive devices are demonstrated to combine high performance with a simple planar device processing technology.
Keywords :
III-V semiconductors; Schottky barriers; Schottky diodes; aluminium compounds; electric sensing devices; gallium compounds; gas sensors; hydrogen storage; junction gate field effect transistors; oxidation; platinum; wide band gap semiconductors; 150 degC; AlGaN-GaN; GaN Schottky contacts; GaN based gas sensitive devices; Pt-GaN; Pt/GaN interface; Schottky diodes; elastic recoil detection; field effect based gas detection; gas sensitive AlGaN-GaN heterostructure field effect transistors; group III-nitride materials; hydrogen accumulation; oxidation; planar device processing; sensor properties; temperature dependent sensitivity; transient properties; Aluminum gallium nitride; Gallium nitride; Gas detectors; HEMTs; Hydrogen; MODFETs; Schottky diodes; Sensor phenomena and characterization; Temperature dependence; Temperature sensors;
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
DOI :
10.1109/SIM.2002.1242727