DocumentCode
2256838
Title
Differences and similarities between structural properties of GaN grown by different growth methods
Author
Liliental-Weber, Z. ; Jasinski, J. ; Washburn, J.
Author_Institution
Lawrence Berkeley Nat. Lab., CA, USA
fYear
2002
fDate
30 June-5 July 2002
Firstpage
70
Lastpage
75
Abstract
In this paper, defects formed in GaN grown by different methods are reviewed. The crystal growth direction and growth rate play important roles. For bulk crystals grown under high pressure the highest growth rates are for planes perpendicular to the c-axis. Only planar defects formed on c-planes are observed in these crystals. There are no threading dislocations or nanotubes in the c-direction. However, polarity of the growth direction plays a role in the surface roughness and the distribution of planar defects. For the growth of homo-epitaxial and hetero-epitaxial layers, the growth is forced to take place in the much slower c-direction. As a result, defects related to the purity of constituents used for the growth are formed such as nanotubes and pinholes. In addition, threading dislocations and dislocations that accommodate lattice and thermal expansion mismatch are formed.
Keywords
III-V semiconductors; MOCVD coatings; dislocation density; gallium compounds; nanotubes; screw dislocations; semiconductor epitaxial layers; surface roughness; thermal expansion; wide band gap semiconductors; Al2O3; GaN; GaN growth; heteroepitaxial layers; high pressure effect; homoepitaxial layers; lattice parameters; nanotubes; planar defects; structural properties; surface roughness; thermal expansion; threading dislocations; Buffer layers; Crystals; Fasteners; Gallium nitride; MOCVD; Metalworking machines; Nanotubes; Nitrogen; Silicon carbide; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN
0-7803-7418-5
Type
conf
DOI
10.1109/SIM.2002.1242728
Filename
1242728
Link To Document