• DocumentCode
    2256838
  • Title

    Differences and similarities between structural properties of GaN grown by different growth methods

  • Author

    Liliental-Weber, Z. ; Jasinski, J. ; Washburn, J.

  • Author_Institution
    Lawrence Berkeley Nat. Lab., CA, USA
  • fYear
    2002
  • fDate
    30 June-5 July 2002
  • Firstpage
    70
  • Lastpage
    75
  • Abstract
    In this paper, defects formed in GaN grown by different methods are reviewed. The crystal growth direction and growth rate play important roles. For bulk crystals grown under high pressure the highest growth rates are for planes perpendicular to the c-axis. Only planar defects formed on c-planes are observed in these crystals. There are no threading dislocations or nanotubes in the c-direction. However, polarity of the growth direction plays a role in the surface roughness and the distribution of planar defects. For the growth of homo-epitaxial and hetero-epitaxial layers, the growth is forced to take place in the much slower c-direction. As a result, defects related to the purity of constituents used for the growth are formed such as nanotubes and pinholes. In addition, threading dislocations and dislocations that accommodate lattice and thermal expansion mismatch are formed.
  • Keywords
    III-V semiconductors; MOCVD coatings; dislocation density; gallium compounds; nanotubes; screw dislocations; semiconductor epitaxial layers; surface roughness; thermal expansion; wide band gap semiconductors; Al2O3; GaN; GaN growth; heteroepitaxial layers; high pressure effect; homoepitaxial layers; lattice parameters; nanotubes; planar defects; structural properties; surface roughness; thermal expansion; threading dislocations; Buffer layers; Crystals; Fasteners; Gallium nitride; MOCVD; Metalworking machines; Nanotubes; Nitrogen; Silicon carbide; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
  • Print_ISBN
    0-7803-7418-5
  • Type

    conf

  • DOI
    10.1109/SIM.2002.1242728
  • Filename
    1242728