DocumentCode :
2256838
Title :
Differences and similarities between structural properties of GaN grown by different growth methods
Author :
Liliental-Weber, Z. ; Jasinski, J. ; Washburn, J.
Author_Institution :
Lawrence Berkeley Nat. Lab., CA, USA
fYear :
2002
fDate :
30 June-5 July 2002
Firstpage :
70
Lastpage :
75
Abstract :
In this paper, defects formed in GaN grown by different methods are reviewed. The crystal growth direction and growth rate play important roles. For bulk crystals grown under high pressure the highest growth rates are for planes perpendicular to the c-axis. Only planar defects formed on c-planes are observed in these crystals. There are no threading dislocations or nanotubes in the c-direction. However, polarity of the growth direction plays a role in the surface roughness and the distribution of planar defects. For the growth of homo-epitaxial and hetero-epitaxial layers, the growth is forced to take place in the much slower c-direction. As a result, defects related to the purity of constituents used for the growth are formed such as nanotubes and pinholes. In addition, threading dislocations and dislocations that accommodate lattice and thermal expansion mismatch are formed.
Keywords :
III-V semiconductors; MOCVD coatings; dislocation density; gallium compounds; nanotubes; screw dislocations; semiconductor epitaxial layers; surface roughness; thermal expansion; wide band gap semiconductors; Al2O3; GaN; GaN growth; heteroepitaxial layers; high pressure effect; homoepitaxial layers; lattice parameters; nanotubes; planar defects; structural properties; surface roughness; thermal expansion; threading dislocations; Buffer layers; Crystals; Fasteners; Gallium nitride; MOCVD; Metalworking machines; Nanotubes; Nitrogen; Silicon carbide; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
Type :
conf
DOI :
10.1109/SIM.2002.1242728
Filename :
1242728
Link To Document :
بازگشت