DocumentCode
2257070
Title
Visible rown-temperature photoluminescence of AlN films, prepared by RF magnetron sputtering
Author
Ligatchev, V. ; Wong, T.K.S. ; Yoon, S.F. ; Ahn, J. ; Rusli
Author_Institution
Nanyang Technological University
fYear
2002
fDate
30 June-5 July 2002
Firstpage
129
Lastpage
132
Keywords
Crystallization; Optical pulses; Photoluminescence; Power lasers; Pulse measurements; Radio frequency; Sputtering; Temperature; Wavelength measurement; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN
0-7803-7418-5
Type
conf
DOI
10.1109/SIM.2002.1242740
Filename
1242740
Link To Document