Title :
Visible rown-temperature photoluminescence of AlN films, prepared by RF magnetron sputtering
Author :
Ligatchev, V. ; Wong, T.K.S. ; Yoon, S.F. ; Ahn, J. ; Rusli
Author_Institution :
Nanyang Technological University
fDate :
30 June-5 July 2002
Keywords :
Crystallization; Optical pulses; Photoluminescence; Power lasers; Pulse measurements; Radio frequency; Sputtering; Temperature; Wavelength measurement; X-ray scattering;
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
DOI :
10.1109/SIM.2002.1242740