A flexible micromachined electrode array for a cochlear prosthesis

Author

Bell, Tracy E. ; Wise, Kensall D. ; Anderson, David J.

Author_Institution

Center for Integrated Sensors & Circuits, Michigan Univ., Ann Arbor, MI, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1315

Abstract

A micromachined silicon electrode array intended for use as a cochlear implant is reported. The flexible array is formed using a boron etch-stop for substrate definition and contains twenty-two IrO stimulating sites implemented on 750 μm centers. The insertable portion of the array is 25 mm long and 320 μm to 640 μm in width; the back end of the device provides interconnects to implanted current generation circuitry. Device functionality has been verified through in-vivo experiments, and the associated evoked auditory brainstem responses are reported. Thresholds for monopolar stimulation are less than 80 μA. The integration of polysilicon strain gauges on the array will permit imaging of implant position to bending angles of less than 3° over a 3 mm segment

Keywords

arrays; auditory evoked potentials; biomedical electronics; hearing aids; microelectrodes; micromachining; microsensors; prosthetics; silicon; 25 mm; 320 to 640 micron; 80 muA; Si; auditory brainstem responses; cochlear prosthesis; evoked auditory brainstem responses; flexible micromachined electrode array; implant position; implanted current generation circuitry; microprobes; monopolar stimulation; polysilicon strain gauges; substrate definition; Circuits; Cochlear implants; Deafness; Electrodes; Frequency; Hair; Prosthetics; Silicon; Substrates; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635478

Filename

635478