DocumentCode :
2257148
Title :
Advanced X-ray imaging techniques for semiconductor wafer characterisation
Author :
Baumbach, Tilo ; Mikulik, P. ; Korytar, D. ; Pernot, P. ; Lubbert, D. ; Helfen, L. ; Herms, M. ; Landesberger, Ch.
Author_Institution :
Fraunhofer-Institut, EADQ
fYear :
2002
fDate :
30 June-5 July 2002
Firstpage :
153
Lastpage :
158
Keywords :
Gallium arsenide; Image resolution; Lattices; Optical imaging; Silicon; Surfaces; Synchrotron radiation; Visualization; X-ray diffraction; X-ray imaging;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
Type :
conf
DOI :
10.1109/SIM.2002.1242745
Filename :
1242745
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2257148
