DocumentCode
2257148
Title
Advanced X-ray imaging techniques for semiconductor wafer characterisation
Author
Baumbach, Tilo ; Mikulik, P. ; Korytar, D. ; Pernot, P. ; Lubbert, D. ; Helfen, L. ; Herms, M. ; Landesberger, Ch.
Author_Institution
Fraunhofer-Institut, EADQ
fYear
2002
fDate
30 June-5 July 2002
Firstpage
153
Lastpage
158
Keywords
Gallium arsenide; Image resolution; Lattices; Optical imaging; Silicon; Surfaces; Synchrotron radiation; Visualization; X-ray diffraction; X-ray imaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN
0-7803-7418-5
Type
conf
DOI
10.1109/SIM.2002.1242745
Filename
1242745
Link To Document